By Ray Hemachandra, Julia Galloway
Shape, functionality, good looks: vases are flexible and flexible, and loved by means of potters for the diversity of strategies, rules, and aesthetics they include. 500 Vases is the 10th ebook dedicated to ceramics within the renowned sequence, and a welcome boost. It showcases the best modern paintings from foreign artists, shooting the whole spectrum of types, every one potter's unique voice, and each time attainable, close-up info that actually catch the outside caliber of the piece.
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Additional info for 500 Vases: Contemporary Explorations of a Timeless Form (500 Series)
5. The device consists of heavily P-doped LPCVD polysilicon structural components deposited on a Si wafer using LTO both as a sacrificial layer and as an electrical isolation layer. 4 µm thick LTO film is deposited on the Si substrate. A 2 µm thick doped polysilicon layer is then deposited on the LTO film. Photolithography and RIE steps are then performed to define the rotor, stator, and rotor–stator gap. To fabricate the flange, a sacrificial mold is created by etching into the LTO film with an isotropic etchant and then partially oxidizing the polysilicon rotor and stator structures to form what is called the bearing clearance oxide.
On Solid-State Sensors and Actuators, June, Yokohama, June 7–10, 1993, pp. 296–99. A. (1977) “Comparison of Properties of Dielectric Films Deposited by Various Methods,” J. Vac. Sci. Technol. 21, pp. 1064–81. , and Kicher, T. (1999) “Fabrication and Testing of Micromachined Silicon Carbide and Nickel Fuel Atomizers for Gas Turbine Engines,” J. MEMS 8, pp. 251–57. Ramesham, R. (1999) “Fabrication of Diamond Microstructures for Microelectromechanical Systems (MEMS) by a Surface Micromachining Process,” Thin Solid Films 340, pp.
In general, diamond surfaces are chemically inert in the same environments as SiC. Diamond has a very high Young’s modulus (1035 GPa), making it the ideal material for high-frequency micromachined resonators. Perhaps diamond’s only disadvantage from a materials properties perspective is that a stable oxide cannot be grown on its surface. Thermal oxidation results in the formation of CO and CO2, which, of course, are gaseous substances under standard conditions. This complicates the fabrication of diamond-based electronic devices as deposited insulating thin films must be used.